Prober Shuttle PS8e
A compact, fully integrated nanoprobing system for your SEM or FIB-SEM, encoded for automatic probe pre-alignment. Rated for the 3 nm node and beyond.
- Encoded axes
- 27
- Linear resolution
- < 0.02 nm
- Noise floor
- 20 fA @ 1 Hz
- Node rating and beyond
- 3 nm
Encoded on all 27 axes
Every axis of the PS8e incorporates a positional encoder: the three axes on each of up to eight ultra-flat MM4 manipulators, plus the three-axis substage. User-definable store points let you re-address the same sample locations on demand.
- Park and restore all eight probes and the substage in about one minute
- Complete probing workflow at low acceleration voltage, minimizing beam-induced damage to the device under test
- Advanced Probing Tools suite, including Live Contact Tester and EBIC/EBAC imaging
- Non-magnetic design for use with immersion lenses
- Tilts to FIB angle for circuit-edit and delayering work
- Load-lock compatible; controlled entirely from the APT UI
Get in touch
Sales & enquiries
Kleindiek Nanotechnik Asia
Regus Vision Exchange
2 Venture Drive #24-01
Singapore 608526
Distributor for ASEAN
Extrad Instrumentation Pte Ltd
Regus JTC Summit
8 Jurong Town Hall Road, Level #24-03
Singapore 609434
jasonchiew@extrad-asean.com
+65 6818 0849
www.extrad-asean.com
Headquarters
Kleindiek Nanotechnik GmbH
Aspenhaustraße 25
72770 Reutlingen, Germany
Find your local agent at www.kleindiek.com